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| Nano Devices and Microsystem Technologies: Brief Overview |
Svitlana Sotnik, Vyacheslav Lyashenko, Tetyana Shakurova
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Abstract:
The article provides brief overview of composition and principle of Nano devices and microsystem technology operation, which allows focusing on important micro processing technologies, which are proposed to be divided into 4 classes; analyzes principles of surface treatment technology - prospect of development and promotion of new range of intelligent materials, innovative architectures and technologies for their production.
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