Title: High-quality Ge and Sn Thin Films Deposited on Si Substrate by Magnetron Sputtering
Authors: Jurabek Abdiyev, Sadulla Saydullayev, Bekzod Erkinov, Sherzod Yarashev, Elyor G\'aybulloyev
Volume: 5
Issue: 3
Pages: 108-115
Publication Date: 3/28/2021//
Abstract:
GexSn1-x is one of the most promising materials in optoelectronics for its direct band-gap nature. In this paper, we report high-quality Ge and Sn thin films deposited on Si 001 substrates by magnetron sputtering. We found that the growth power and chambe